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技术参数
Measuring head CX CI
Image acquistion module BM 512 Digital camera with progressive-
scan technology, up to 25fps,
512 x 512 Pixel, 8bit, Firewire Fast digital camera with progressive-
scan technology, up to 58fps,
512 x 512 Pixel, 12 Bit, Firewirs
light source, adjustable Halogen light source
(LS 100) Powerfull-Xe-light source
(LX 100, LX 180)
Scan modules
x, y-axis module MS 50 Precision x, y-table, 50 x 50mm, resolution 0.1μm
z-axis module ZM 100 Precision scanning module, range 100mm, resolution 0.1μm
z-axis module NV 350 - Fast precision scanning module (Piezo),
measuring range 350μm, resolution < 1nm
Optic modules1) 1600 S 800 L / S / XS 320 L / S / XS 160 L / S
Measurement area (x/y)(um)2
(XY测量范围) 1600 x 1600 800 x 800 320 x 320 160 x 160
Numerical aperture
(NA值) 0.3 0.4 / 0.46 / 0.6 0.5 / 0.8 / 0.95 0.8 / 0.95
Working distance(mm)
Z方向测量范围 10.1 12 / 3.1 / 0.9 10.6 / 0.66 / 0.3 3.4 / 0.31
Resolution in z-direction(nm)CX
(Z方向范围分辨率) CI2) 50
20 35 / 30 / -
6 / 5 / 4 25 / 15 / -
4 / 2 / 2 -
2 / 1
Resolution in x,y-direction
(XY分辨率) 2.9 1.5 0.6 0.31
1) L : long working distance, S : normal working distance, XS : short working distance, 2) noise level (only with NV350)
